• формат pdf
  • размер 6.23 МБ
  • добавлен 15 декабря 2011 г.
Makabe T., Petrovic Z. Plasma Electronics: Applications in Microelectronic Device Fabrication
Taylor & Francis, CRC Press, 2006, Pages: 330

Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagnosis. Plasma Electronics: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods necessary to bring these technologies from the laboratory to the factory. Beginning with an overview of the basic characteristics and applications of low-temperature plasma, preeminent experts Makabe and Petrovic explore the physics underlying the complex behavior of non-equilibrium (or low temperature) plasma.

Phenomenological Description of the Charged Particle Transport
Macroscopic Plasma Characteristics
Elementary Processes in Gas Phase and on Surfaces
The Boltzmann Equation and Transport Equations of Charged Particles
General Properties of Charged Particle Transport in Gases
Modeling of Nonequilibrium (Low-Temperature) Plasmas
Numerical Procedure of Modeling
Capacitively Coupled Plasma
Inductively Coupled Plasma
Magnetically Enhanced Plasma
Plasma Processing and Related Topics
Похожие разделы
Смотрите также

D'Agostino R., Favia P., Oehr Ch., Wertheimer M.R. Plasma Processes and Polymers

Статья
  • формат pdf
  • размер 7.11 МБ
  • добавлен 11 сентября 2011 г.
16th International Symposium on Plasma Chemistry, Taormina, Italy June 22-27, 2003 Wiley-VCH, Weinheim, 2005, 545 pages This volume compiles essential contributions to the most innovative fields of Plasma Processes and Polymers. High-quality contributions cover the fields of plasma deposition, plasma treatment of polymers and other organic compounds, plasma processes under partial vacuum and at atmospheric pressure, biomedical, textile, automot...

Dinklage A., Klinger T., Marx G., Schweikhard L. (Eds.) Plasma Physics: Confinement, Transport and Collective Effects

  • формат pdf
  • размер 18.99 МБ
  • добавлен 25 декабря 2011 г.
Springer, 2005, 496 pages This book provides an overview of modern plasma research with special focus on confinement and related issues. Beginning with a broad introduction, the book leads graduate students and researchers – also those from related fields - to an understanding of the state-of-the-art in modern plasma physics. Furthermore, it presents a methodological cross section ranging from plasma applications and plasma diagnostics to numer...

Fridman A. Plasma Physics and Engineering

  • формат pdf
  • размер 10.29 МБ
  • добавлен 28 мая 2010 г.
Plasma (Ionized gases) , Plasma engineering, Plasma (Gaz-ionis?©s) , Plasmas, Technique des. Fundamentals of Plasma Physics and Plasma Chemistry; Physics and Engineering of Electric Discharges. Publication date: 2004. Pages: 852 Language: English

Harry J.E. Introduction to Plasma Technology: Science, Engineering and Applications

  • формат pdf
  • размер 10.38 МБ
  • добавлен 19 марта 2011 г.
Wiley-VCH, 2010. 232 p. ISBN: 3527327630 Written by a university lecturer with more than forty years experience in plasma technology, this book adopts a didactic approach in its coverage of the theory, engineering and applications of technological plasmas. The theory is developed in a unified way to enable brevity and clarity, providing readers with the necessary background to assess the factors that affect the behavior of plasmas under differe...

Melrose D. Quantum Plasmadynamics: Unmagnetized Plasmas

  • формат pdf
  • размер 2.65 МБ
  • добавлен 17 ноября 2011 г.
Springer Science+Business Media, 2008, 464 pages The field of quantum plasmas has a long and diverse tradition and is becoming of increasing current interest, motivated by applications to micro-electronics and to focused high-power lasers. In this book, plasma kinetic theory is developed a covariant (4-tensor) notation, which facilitates generalizations to include all relativistic and electromagnetic effects. Relativistic quantum effects are in...

Ostrikov K. Plasma Nanoscience: Basic Concepts and Applications of Deterministic Nanofabrication

  • формат pdf
  • размер 10.83 МБ
  • добавлен 20 августа 2011 г.
Wiley-VCH, 2008, 563 pages Filling the need for a single work specifically addressing how to use plasma for the fabrication of nanoscale structures, this book is the first to cover plasma deposition in sufficient depth. The author has worked with numerous R&D institutions around the world, and here he begins with an introductory overview of plasma processing at micro- and nanoscales, as well as the current problems and challenges, before goin...

Rauscher H., Perucca M., Buyle G. (Eds.) Plasma Technology for Hyperfunctional Surfaces: Food, Biomedical, and Textile Applications

  • формат pdf
  • размер 3.68 МБ
  • добавлен 11 сентября 2011 г.
Wiley-VCH, Weinheim, 2010, 400 pages Based on a project backed by the European Union, this is a must-have resource for researchers in industry and academia concerned with application-oriented plasma technology research. Clearly divided in three sections, the first part is dedicated to the fundamentals of plasma and offers information about scientific and theoretical plasma topics, plasma production, surface treatment process and characterizatio...

Roth J.R. Industrial Plasma Engineering. Volume 2: Applications to Nonthermal Plasma Processing

  • формат pdf
  • размер 4.73 МБ
  • добавлен 13 марта 2011 г.
IOP, Institute of Physics Publishing, Bristol and Philadelphia, 2001, 645 c. Второй том книги о плазменных технологиях. Содержит разделы: Surface Interactions in Plasma Processing Atmospheric Pressure Plasma Sources Vacuum Plasma Sources Plasma Reactors for Plasma Processing Specialized Techniques and Devices for Plasma Processing Parametric Plasma Effects On Plasma Processing Diagnostics for Plasma Processing Plasma Treatment of Surfaces Surface...

Sheffield J., Froula D., Glenzer S.H., Luhmann N.C. Plasma Scattering of Electromagnetic Radiation: Theory and Measurement Techniques

  • формат pdf
  • размер 11.92 МБ
  • добавлен 13 сентября 2011 г.
Second Edition, Elsevier Academic Press, 2011, 497 pages This work presents one of the most powerful methods of plasma diagnosis in exquisite detail, to guide researchers in the theory and measurement techniques of light scattering in plasmas. Light scattering in plasmas is essential in the research and development of fusion energy, environmental solutions, and electronics. Referred to as the "Bible" by researchers, the work encompasses fusion...

Vladimirov S.V., Ostrikov K., Sarnarian A.A. Physics and Applications of Complex Plasmas

  • формат pdf
  • размер 22 МБ
  • добавлен 20 августа 2011 г.
Imperial College Press, Singapore, 2005, 439 p. The physics of complex plasma systems containing a colloid macroscopic particle component (dust) is a rapidly emerging area at the forefront of the physics and chemistry of plasmas and gas discharges, space physics and astrophysics, and materials science and engineering. Complex plasma systems with nano- and microscopic particle inclusions is now a hot topic for many research areas. Such plasma syst...