Francombe M.H., Vossen J.L. Physics of Thin Films. Plasma Sources for thin film deposition and etching

Wiley-VCH, Weinheim, 2008, 457 pages A panel of internationally renowned scientists discuss the latest results in plasma technology. This volume has been compiled with both a didactic approach and an overview of the newest achievements for industrial applications. It is divided into two main sections. One is focused on fundamental technology, including plasma production and control, high-pressure discharges, modeling and simulation, diagnostics...

Academic Press, Boston, 1989, 260 c. В книге представлены такие большие главы: 1) Реактивное распыление 2) Плазменное окисление 3) Катодное дуговое плазменное осаждение тонких пленок 4) Подготовка подложек для осаждения пленок с использованием методик тлеющего разряда

Plasma (Ionized gases) , Plasma engineering, Plasma (Gaz-ionis?©s) , Plasmas, Technique des. Fundamentals of Plasma Physics and Plasma Chemistry; Physics and Engineering of Electric Discharges. Publication date: 2004. Pages: 852 Language: English

CRC Press, Taylor & Francis Group, 2005, Pages: 592 While ion-beam techniques have been used to create thin films in the semiconductor industry for several decades, these methods have been too costly for other surface treatment applications. However, as manufacturing devices become increasingly smaller, the use of a directed-energy ion beam is finding novel industrial applications that require the custom tailoring of new materials and devi...

Taylor & Francis, CRC Press, 2006, Pages: 330 Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagn...

William Andrew, 2010, 912 pages Recent years have seen a rapid expansion in the applications of advanced thin film coatings in areas including photovoltaics, energy conversion, energy efficiency, biomedical engineering, telecommunications, pharmaceuticals and flat panel displays. In a tough economic climate, surface engineering remains a growth industry, because surface engineered products improve performance, increase energy efficiency, add fu...

Elsevier Science, 2006, Pages: 722 The current status of the science and technology related to coatings, thin films and surface modifications produced by directed energy techniques is assessed in this book. The subject matter is divided into 20 chapters - each presented at a tutorial level - rich with fundamental science and experimental results. New trends and new results are also evoked to give an overview of future developments and applicat...

Noyes publications, Park Ridge, New Jersey, U.S.A. 1990, 536 стр. Рассматриваются физические основы ряда газовых разрядов, используемых в плазменных технологиях для травления и осаждения различных покрытий. Книга имеет следующие разделы. Techniques for ic processing. Introduction to plasma concepts and discharge configurations. Fundamentals of sputtering and reflection. Bombardment-Induced compositional change with alloys, Oxides, Oxysalts, And h...

IOP, Institute of Physics Publishing, Bristol and Philadelphia, 2001, 645 c. Второй том книги о плазменных технологиях. Содержит разделы: Surface Interactions in Plasma Processing Atmospheric Pressure Plasma Sources Vacuum Plasma Sources Plasma Reactors for Plasma Processing Specialized Techniques and Devices for Plasma Processing Parametric Plasma Effects On Plasma Processing Diagnostics for Plasma Processing Plasma Treatment of Surfaces Surface...

Springer, Berlin Heidelberg, 2008, 370 p. Complex plasmas are dusty plasmas in which the density and electric charges of the dust grains are sufficiently high to induce long-range grain-grain interactions, as well as strong absorption of charged-plasma components. Together with the sources replenishing the plasma such systems form a highly dissipative thermodynamically open system that exhibits many features of collective behaviour generally foun...