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Cressler J.D. Fabrication of SiGe HBT BiCMOS Technology
CRC Press. 2008. -260 p. ISBN 978-1-4200-6687-6
Книга посвящена вопросам технологии SiGe HBT BiCMOS для аналоговых интегральных схем СВЧ диапазона. Приведено описание технологий известных зарубежных фирм.
Contents
The Big Picture
Brief History of the Field
Overview: Fabrication of SiGe HBT BiCMOS Technology
Device Structures and BiCMOS Integration
SiGe HBTs on CMOS-Compatible SOI
Passive Components
Industry Examples at the State-of-the-Art: IBM
Industry Examples at the State-of-the-Art: Jazz
Industry Examples at the State-of-the-Art: Hitachi
Industry Examples at the State-of-the-Art: Infineon
Industry Examples at the State-of-the-Art: IHP
Industry Examples at the State-of-the-Art: ST
Industry Examples at the State-of-the-Art: Texas Instruments
Industry Examples at the State-of-the-Art: Philips
Properties of Silicon and Germanium
The Generalized Moll–Ross Relations
Integral Charge-Control Relations
Sample SiGe HBT Compact Model Parameters