Michael Meng-Tsuan Tsay, Manuel Martinez-Sanchez. Two-Dimensional Numerical Modeling of Radio-Frequency Ion Engine Discharge

Cambridge university press, Cambridge, 2011, 385 p. Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engine...

Wiley-VCH, Weinheim, 2008, 457 pages A panel of internationally renowned scientists discuss the latest results in plasma technology. This volume has been compiled with both a didactic approach and an overview of the newest achievements for industrial applications. It is divided into two main sections. One is focused on fundamental technology, including plasma production and control, high-pressure discharges, modeling and simulation, diagnostics...

Springer, 2005, 496 pages This book provides an overview of modern plasma research with special focus on confinement and related issues. Beginning with a broad introduction, the book leads graduate students and researchers – also those from related fields - to an understanding of the state-of-the-art in modern plasma physics. Furthermore, it presents a methodological cross section ranging from plasma applications and plasma diagnostics to numer...

Springer-Verlag, Berlin, 2009, 732 pages This monograph presents an up to date perspective of gas discharge physics and its applications to various industries. It starts from a comprehensive overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electron cyclotron resonance, and ion beams. To compare these theories with inert plasmas, a fundamental descript...

CRC Press, 2005, 344 pages In chapters culled from the popular and critically acclaimed Electromagnetic Compatibility Handbook, Electrostatic Discharge provides a tightly focused, convenient, and affordable reference for those interested primarily in this subset of topics. Author Kenneth L. Kaiser demystifies electrostatic discharge and explains the source and limitations of the approximations, guidelines, models, and rules-of-thumb used in thi...

Springer Theses, Springer-Verlag, Berlin, 2011, 158 pages The two experimental studies reported in this thesis contribute important new knowledge about phase transitions in two-dimensional complex plasmas: in one case a determination of the coupling parameter (ratio of mean potential to mean kinetic energy of the particles in an ensemble), and in the other a detailed characterization of the non-equilibrium recrystallization of a two-dimensional...

Kluwer Academic Publishers, 2002, 557 p. This book resulted from the NATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges, held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in nanotechnology, to the traditional fields of gas lasers, and discharge lamps. Consequent...

Taylor & Francis, CRC Press, 2006, Pages: 330 Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagn...

Taylor & Francis Group, LLC, Boca Raton, FL, 2006, 680 p. The research on gaseous electronics reaches back more than 100 years. With the growing importance of gas lasers in so many research and industrial applications as well as power systems generating, transmitting, and distributing huge blocks of electrical power, the body of literature on cross sections, drift and diffusion, and ionization phenomena continues to bloom. Searching through t...

Noyes publications, Park Ridge, New Jersey, U.S.A. 1990, 536 стр. Рассматриваются физические основы ряда газовых разрядов, используемых в плазменных технологиях для травления и осаждения различных покрытий. Книга имеет следующие разделы. Techniques for ic processing. Introduction to plasma concepts and discharge configurations. Fundamentals of sputtering and reflection. Bombardment-Induced compositional change with alloys, Oxides, Oxysalts, And h...