Woodhead Publishing, 2011, 4162 pages
Thin-film technology is used in many applications such as microelectronics, optics, magnetics, hard and corrosion resistant coatings and micromechanics. This book provides a review of the theory and techniques for the deposition of thin films. It will help the reader understand the variables affecting growth kinetics and microstructural evolution during deposition. Part 1 covers the theory and modeling of thin film growth whilst Part 2 describes the techniques and mechanisms of film growth. This section covers examples such as silicon nanostructured thin films, colloidal crystal thin films and graphene thin films. It also contains discussion of pliable substrates and thin films for particular functions.
Theory of thin film growth
Measuring nucleation and growth processes in thin films
Quantum electronic stability of atomically uniform films
Phase-field modeling of thin film growth
Analysing surface roughness evolution in thin films
Modelling thin film deposition processes based on real-time observation
Techniques of thin film growth
Silicon nanostructured films grown on templated surfaces by the oblique angle deposition
Phase transitions in colloidal crystal thin films
Thin film growth for thermally unstable noble-metal nitrides by reactive magnetron sputtering
Growth of graphene layers for thin films
Epitaxial growth of graphene thin films on single crystal metal surfaces
Electronic properties and adsorption behaviour of thin films with polar character
Polarity controlled epitaxy of III-nitrides and ZnO by molecular beam epitaxy
Understanding substrate plasticity and buckling of thin films
Controlled buckling of thin films on compliant substrates for stretchable electronics
The electrocaloric effect (ECE) in ferroelectric polymer films
Network behavior in thin films and nanostructure growth dynamics
Thin-film technology is used in many applications such as microelectronics, optics, magnetics, hard and corrosion resistant coatings and micromechanics. This book provides a review of the theory and techniques for the deposition of thin films. It will help the reader understand the variables affecting growth kinetics and microstructural evolution during deposition. Part 1 covers the theory and modeling of thin film growth whilst Part 2 describes the techniques and mechanisms of film growth. This section covers examples such as silicon nanostructured thin films, colloidal crystal thin films and graphene thin films. It also contains discussion of pliable substrates and thin films for particular functions.
Theory of thin film growth
Measuring nucleation and growth processes in thin films
Quantum electronic stability of atomically uniform films
Phase-field modeling of thin film growth
Analysing surface roughness evolution in thin films
Modelling thin film deposition processes based on real-time observation
Techniques of thin film growth
Silicon nanostructured films grown on templated surfaces by the oblique angle deposition
Phase transitions in colloidal crystal thin films
Thin film growth for thermally unstable noble-metal nitrides by reactive magnetron sputtering
Growth of graphene layers for thin films
Epitaxial growth of graphene thin films on single crystal metal surfaces
Electronic properties and adsorption behaviour of thin films with polar character
Polarity controlled epitaxy of III-nitrides and ZnO by molecular beam epitaxy
Understanding substrate plasticity and buckling of thin films
Controlled buckling of thin films on compliant substrates for stretchable electronics
The electrocaloric effect (ECE) in ferroelectric polymer films
Network behavior in thin films and nanostructure growth dynamics