Koster G., Rijnders G. (Eds.) In situ Characterization of Thin Film Growth

формат pdf
размер 10.01 МБ
добавлен 21 декабря 2011 г.

Woodhead Publishing, 2011, 282 pages

Recent advances in techniques to characterize thin films in-situ during deposition could lead to an improved understanding of deposition processes and to better, faster, diagnosis of issues with the deposition process. In-situ characterization of thin film growth will provide a comprehensive review of this increasingly important topic, focusing on the techniques and concepts.

Electron diffraction techniques for studying thin film growth in situ
Reflection high-energy electron diffraction (RHEED) for in situ characterization of thin film growth
Inelastic scattering techniques for in situ characterization of thin film growth: backscatter Kikuchi diffraction

Photoemission techniques for studying thin film growth in situ
Ultraviolet photoemission spectroscopy (UPS) for in situ characterization of thin film growth
X-ray photoelectron spectroscopy (XPS) for in situ characterization of thin film growth
In situ spectroscopic ellipsometry (SE) for characterization of thin film growth

Alteative in situ characterization techniques
In situ ion beam surface characterization of thin multicomponent films
Spectroscopies combined with reflection high-energy electron diffraction (RHEED) for real-time in situ surface monitoring of thin film growth
In situ deposition vapor monitoring
Real-time studies of epitaxial film growth using surface X-ray diffraction (SXRD)

Похожие разделы

Смотрите также

Чопра К.Л. Электрические явления в тонких пленках

формат djvu
размер 6.93 МБ
добавлен 13 января 2011 г.

Избранные главы из книги Thin film phenomena. М.: Мир, 1972. - 424 с. Книга представляет собой фундаментальный труд по вопросам зарождения, роста и структуры тонких слоев, явлениям переноса носителей тока в аморфных, поликристаллических и эпитаксиальных пленках металлов, полупроводников и диэлектриков. Особое место в книге отводится тонкопленочной сверхпроводимости; освещены вопросы возможного применения этого явления в новой технике.

Cao Z. (Ed.) Thin Film Growth: Physics, materials science and applications

формат pdf
размер 31.68 МБ
добавлен 12 декабря 2011 г.

Woodhead Publishing, 2011, 4162 pages Thin-film technology is used in many applications such as microelectronics, optics, magnetics, hard and corrosion resistant coatings and micromechanics. This book provides a review of the theory and techniques for the deposition of thin films. It will help the reader understand the variables affecting growth kinetics and microstructural evolution during deposition. Part 1 covers the theory and modeling of...

Duo L., Finazzi M., Ciccacci F. (ed.). Magnetic Properties of Antiferromagnetic Oxide Materials

формат pdf
размер 4.64 МБ
добавлен 19 февраля 2011 г.

Wiley. 2010. 363 p. Low-Dimensional Antiferromagnetic Oxides: An Overview Growth of Antiferromagnetic Oxide Thin Films Dichroism in X-ray Absorption for the Study of Antiferromagnetic Materials Antiferromagnetic Oxide Films on Nonmagnetic Substrates Exchange Bias by Antiferromagnetic Oxides Theory of Ferromagnetic-Antiferromagnetic Interface Coupling Antiferromagnetic-Ferromagnetic Oxide Multilayers: Fe3O4-Based Systems as a Model Micromagnetic S...

Martin P. Introduction to Surface Engineering and Functionally Engineered Materials

формат pdf
размер 40.88 МБ
добавлен 27 ноября 2011 г.

Wiley-Scrivener Publishing, 2011, 565 pages This book provides a clear and understandable text for users and developers of advanced engineered materials, particularly in the area of thin films, and addresses fundamentals of modifying the optical, electrical, photo-electric, triboligical, and corrosion resistance of solid surfaces and adding functionality to solids by engineering their surface, structure, and electronic, magnetic and optical str...

Pelliccione M., Lu T.-M. Evolution of Thin Film Morphology: Modeling and Simulations

формат pdf
размер 3.13 МБ
добавлен 15 декабря 2011 г.

Springer-Verlag Berlin, 2008, 204 pages Thin film deposition is the most ubiquitous and critical of the processes used to manufacture high tech devices. Morphology and microstructure of thin films directly controls their optical, magnetic, and electrical properties. This book focuses on modeling and simulations used in research on the morphological evolution during film growth. The authors emphasize the detailed mathematical formulation of the...

Ramanathan Sh. (Ed.) Thin Film Metal-Oxides: Fundamentals and Applications in Electronics and Energy

формат pdf
размер 9.7 МБ
добавлен 29 декабря 2011 г.

Springer Science+Business Media, 2010, 337 pages Metal oxides are an important class of materials: from both scientific and technological perspectives they present interesting opportunities for research. Thin films are particularly attractive owing to their relevance in devices and also for the ability to pursue structure–property relations studies using controlled microstructures. The inherent compositional complexity (due to the presence of...

Rockett A. The Materials Science of Semiconductors

формат pdf
размер 15.76 МБ
добавлен 20 августа 2011 г.

Springer, New York, 2008, 622 pages This book describes semiconductors from a materials science perspective rather than from condensed matter physics or electrical engineering viewpoints. It includes discussion of current approaches to organic materials for electronic devices. It further describes the fundamental aspects of thin film nucleation and growth, and the most common physical and chemical vapor deposition techniques. Examples of the app...

Seshan K. (Ed.) Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications

формат pdf, gif, png, htm
размер 5.06 МБ
добавлен 16 января 2012 г.

Noyes Publications, 2002, ISBN:9802384920, 420 pages New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by i...

Trebin H.-R. (Ed.) Quasicrystals: Structure and Physical Properties

формат djvu
размер 12.15 МБ
добавлен 15 января 2012 г.

Wiley-VCH, 2003, ISBN: 352740399X, 648 pages A comprehensive and up-to-date review, covering the broad range of this outstanding class of materials among intermetallic alloys. Starting with metallurgy and characterization, the authors continue on to structure and mathematical modeling. They use this basis to move on to dealing with electronic, magnetic, thermal, dynamic and mechanical properties, before finally providing an insight into surface...

Venables J. Introduction to Surface and Thin Film Processes

формат pdf
размер 6.45 МБ
добавлен 19 января 2011 г.

Cambridge University Press, 2003, 372p. Introduction to surface processes Surfaces in vacuum: ultra-high vacuum techniques and processes Electron-based techniques for examining surface and thin film processes Surface processes in adsorption Surface processes in epitaxial growth Electronic structure and emission processes at metallic surfaces Semiconductor surfaces and interfaces Surface processes in thin film devices Postscript – where do we go...