Chapman B., Glow discharge processes. Sputtering and plasma etching

Wiley-VCH, Weinheim, 2008, 457 pages A panel of internationally renowned scientists discuss the latest results in plasma technology. This volume has been compiled with both a didactic approach and an overview of the newest achievements for industrial applications. It is divided into two main sections. One is focused on fundamental technology, including plasma production and control, high-pressure discharges, modeling and simulation, diagnostics...

16th International Symposium on Plasma Chemistry, Taormina, Italy June 22-27, 2003 Wiley-VCH, Weinheim, 2005, 545 pages This volume compiles essential contributions to the most innovative fields of Plasma Processes and Polymers. High-quality contributions cover the fields of plasma deposition, plasma treatment of polymers and other organic compounds, plasma processes under partial vacuum and at atmospheric pressure, biomedical, textile, automot...

Springer-Verlag, Berlin, 2009, 732 pages This monograph presents an up to date perspective of gas discharge physics and its applications to various industries. It starts from a comprehensive overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electron cyclotron resonance, and ion beams. To compare these theories with inert plasmas, a fundamental descript...

Kluwer Academic Publishers, 2002, 557 p. This book resulted from the NATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges, held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in nanotechnology, to the traditional fields of gas lasers, and discharge lamps. Consequent...

John Wiley & Sons, Inc. , 1994, 572 p. Preface Symbols And Abbreviations Physical Constants And Conversion Factors Practical Formulae Introduction Basic Plasma Equations And Equilibrium Atomic Collisions Plasma Dynamics Diffusion And Transport DC Sheaths Chemical Reactions And Equilibrium Molecular Collisions Chemical Kinetics And Surface Processes Particle And Energy Balance In Discharges Capacitive Discharges Inductive Disch...

John Wiley & Sons, Inc. , 2-ed, 2005, 757 p. Preface Preface To The First Edition Symbols And Abbreviations Physical Constants And Conversion Factors Practical Formulae Introduction Basic Plasma Equations And Equilibrium Atomic Collisions Plasma Dynamics Diffusion And Transport Direct Current (DC) Sheaths Chemical Reactions And Equilibrium Molecular Collisions Chemical Kinetics And Surface Processes Particle And Energy Balance In Disch...

Taylor & Francis, CRC Press, 2006, Pages: 330 Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagn...

Noyes publications, Park Ridge, New Jersey, U.S.A. 1990, 536 стр. Рассматриваются физические основы ряда газовых разрядов, используемых в плазменных технологиях для травления и осаждения различных покрытий. Книга имеет следующие разделы. Techniques for ic processing. Introduction to plasma concepts and discharge configurations. Fundamentals of sputtering and reflection. Bombardment-Induced compositional change with alloys, Oxides, Oxysalts, And h...

IOP, Institute of Physics Publishing, Bristol and Philadelphia, 2001, 645 c. Второй том книги о плазменных технологиях. Содержит разделы: Surface Interactions in Plasma Processing Atmospheric Pressure Plasma Sources Vacuum Plasma Sources Plasma Reactors for Plasma Processing Specialized Techniques and Devices for Plasma Processing Parametric Plasma Effects On Plasma Processing Diagnostics for Plasma Processing Plasma Treatment of Surfaces Surface...

WILEY-VCH Verlag, 2007, 572 p. Distributions and Equilibria for Particle Ensembles Elementary Processes in Plasma Slow Atomic Collisions Collisions Involving Electrons Elementary Radiative Processes in Excited Gases Boltzmann Kinetic Equation Transport and Kinetics of Electrons in Gases in External Fields Transport of Ions and Atoms in Gases and Plasmas Kinetics and Radiative Transport of Excitations in Gases Processes in Photoresonant Plasma W...