
Microwave plasma detectors 
163 
and 
N 
through atomic emission lines in the vacuum 
UV 
region. In 
1972 
these 
authors tested a DC-based plasma detection system in combination with a gas 
chromatograph. At high sensitivities the metal electrodes started to evaporate, 
which made the quartz tube less bright and impeded long term stability. Moreo- 
ver, the electrodes reacted with halogens. 
With a microwave plasma McLean et al. 
[ 
1 
11 
reduced the oxygen concentra- 
tion to 
0.1 
- 
1 
% 
and used spectral lines in the visible region for the selective de- 
tection of halogens, H, D, C and 
N. 
They also found that nitrogen could act as a 
carbon scavenger and this discovery enabled oxygen to be included in the range 
of detectable elements. A commercially available system based on this publica- 
tion was produced by Applied Research Laboratories in  England. This system 
used a low-pressure plasma, generated within an Evenson 
214L 
resonance cav- 
ity. The minimum detectable levels (MDL) were about 
100 
pg/s. The selectivity 
of the elements relative to carbon was only about 
100. 
Another possibility to improve the MDLs of the low-pressure plasma, was by 
increasing the plasma pressure. With the Evenson 
214L 
cavity, used to create the 
plasma, the power reflected to the microwave generator increased with the pres- 
sure in the quartz tube. With this cavity it was not possible to operate at an at- 
mospheric pressure. Beenakker 
[12,13] 
described a microwave cavity that is able 
to work with He at atmospheric pressure. He reported lower limits of detection 
between 
1 
and 
100 
pg/s. Using this type of cavity, Quimby et al. 
[14] 
in 
1978, 
measured limits around 
10 
pg/s. At that time it was not yet clear which design 
was best to create a plasma. The  same group 
[15] 
reported the use  of a DC 
plasma, using Ar as a carrier for the determination of metals. Moisan 
[16], 
and 
later Abdallah 
[17], 
described a Surfatron to create a stable plasma. Our own 
experiments with all four types gave rise to the following findings: the Surfatron 
appeared to be very difficult to operate and high MDLs were obtained. The DC 
or AC plasma did not produce sufficiently low limits of detection for non-metals. 
We furthermore encountered problems with the electrodes (reaction and glow- 
ing) at high power. Both the low-pressure plasma with the Evenson cavity and 
the atmospheric plasma of Beenakker produced lower limits 
of 
detection, be- 
tween 
0.1 
and 
10 
pg/s. For the Beenakker cavity this was also reported by Estes 
et al. 
[18,19]. 
However the selectivity relative to  C impeded the use 
of 
these 
systems. 
In order to improve this ratio (about 
loo), 
Applied Research Laboratories in 
the first commercially available instrument, made an improvement by  subtract- 
ing a fraction 
of 
the carbon signal from the measured line (e.g. chlorine). This 
improved the selectivity ratio relative to carbon to about 
1000. 
However, the cor- 
rection had to be adjusted 
for 
every emission line and moreover, the correction 
was not always proportional to the carbon concentration and could only be ap- 
plied over a small concentration range. Wavelength modulation with a refractor 
References 
p. 
200