
260 6 Detectors for Photon Counting
In the last years it became possible to manufacture silicon SPADs in standard
epitaxial processes as they are used for high-speed CMOS devices [117, 245, 246,
354, 424, 459]. The diodes are characterised by a small thickness of the depletion
region. The thin depletion region results in a relatively low breakdown voltage,
high time resolution, and low dark count rate. The drawback of the thin depletion
region is a reduced quantum efficiency in the near infrared. Laser pulses recorded
with an id 100
20 SPAD detector of id Quantique [245] and an SPC144 TCSPC
module of Becker & Hickl are shown in Fig. 6.57.
Fig. 6.57 Diode laser pulses recorded with an id 10020 SPAD at 785 nm and an SPC144
TCSPC module. Left: Wavelength 785 nm, pulse width 24 ps, detector count rates of
61 kHz , 2.7 MHz, and 8.1 MHz. Right: Wavelength 468 nm, laser pulse width 50 ps, de-
tector count rate 1.4 MHz
The curves shown left were measured with a BHL600, 785 nm diode laser of
Becker & Hickl. The FWHM of the diode laser pulses was about 24 ps. The three
curves were recorded at detector count rates of 61 kHz , 2.7 MHz, and 8.1 MHz.
The recorded pulse width (FWHM) is 49 ps, 48 ps and 45 ps, respectively. Cor-
rected for the laser pulse width, the IRF width is 43 ps, 42 ps, and 38 ps. Between
61 kHz and 2.7 MHz, and 61 kHz and 8.1 MHz the IRF shifts by 13 ps and 27 ps,
respectively.
Figure 6.57, right shows the response to a 468 nm diode laser. The pulse width
of the 468 nm laser was about 50 ps; the recorded pulse width 64 ps. The cor-
rected IRF width is about 40 ps.
The shape of the IRF is remarkably clean, without any secondary peaks. There
is, however, a slow tail in the response measured at 785 nm. This „diffusion tail“
is typical for APDs operated at long wavelengths. It is caused by photons which
penetrate the depletion layer and generate photons in the neutral regions nearby.
The tail has negligible amplitude at 468 nm; see Fig. 6.57, right.
The diffusion tail can be a pitfall in fluorescence decay experiments. Figu-
re 6.58 compares the response of two SPADs (id 100
20 of id Quantique [245]
and PDM 50 CT of Micro Photon Devices [354]) with the response of an R3809U
MCP PMT. The tail in the SPAD response is almost single-exponential and can
easily be mistaken for a fluorescence component, especially if the corresponding
IRF is recorded at a significantly shorter wavelength than the fluorescence.