
Electron–Atom and Electron–Molecule Collisions 63.2 Collision Processes 935
predicted by (63.12) is observed. For exchange pro-
cesses, e.g., a triplet excited state from a singlet ground
state, the cross section peaks sharply close to threshold
and falls off at high energy as E
−3
. If the excitation is
spin allowed but optically forbidden, e.g., He n
1
D from
1
1
S , then the Bethe theory predicts an E
−1
dependence
of the cross section at high energies.
When excitation occurs to a long-lived (metastable
or Rydberg) state following electron impact, it is often
possible to detect the excited particle directly. Time-
of-flight (T.O.F.) techniques are used to distinguish the
long lived species from other products, e.g., photons,
produced in the collisions.
63.2.5 Dissociation Cross Sections
Dissociation of a molecular target can result in frag-
ments which may be excited or ionized. Such processes
may be studied using the techniques discussed in the pre-
vious section or in the following section, where charged
particle detection is considered. Because a repulsive
state of the molecule is accessed, the fragments can
leave the interaction region with considerable kinetic
energy (several eV). If the fragment is in a long-lived
metastable or Rydberg state, T.O.F. techniques may be
used to distinguish the long-lived species from other
products such as photons, and also to measure the
energies of the excited fragments, and thus provide in-
formation on the repulsive states responsible for the
dissociation. For further discussion see the reviews by
Compton and Bardsley [63.27], Freund [63.28], and
Zipf [63.29]. If the detector can be made sensitive to
a particular excited species, its excitation can be iso-
lated and studied. Examples are the work of McConkey
and co-workers [63.30,31]onO(
1
S)andS(
1
S
0
) produc-
tion from various molecules. The detection of unexcited
neutral fragments is more challenging. One early method
was to trap selectively the dissociation products using
a getter and measure the resulting pressure decrease.
In a more sophisticated approach, Cosby [63.32]pro-
duced a fast (≈ 1 keV) target molecular beam by resonant
charge exchange and subjected it to electron impact dis-
sociation. The fast dissociation products were detected
by conventional particle detectors in a time correlated
measurement. Laser techniques, such as laser-induced
fluorescence or multiphoton ionization, have also been
used recently to detect the dissociation products.
The Franck–Condon principle largely governs mo-
lecular dissociation. The principle states that if the
excitation takes place on a time scale which is short
compared with vibrational motion of the atomic nu-
clei the transition occurs vertically between potential
energy curves. Since dissociation rapidly follows a ver-
tical transition to the repulsive part of a potential energy
curve, compared with the period of molecular rotation,
the dissociation products tend to move in the direction of
vibrational motion. Since the excitation probability de-
pends on the relative orientation of the electron beam and
the molecule, dissociation products often demonstrate
pronounced anisotropic angular distributions. The an-
gular distributions have been analyzed by Dunn [63.33]
using symmetry considerations.
63.2.6 Ionization Cross Sections
Tate and Smith [63.34] some 60 years ago developed
the basic techniques for measuring total ionization
cross sections. These were later improved by Rapp and
Englander-Golden [63.35]. Full details of the experi-
mental methods are given in the reviews and books
already cited. Märk and Dunn[63.36] reviewed the situ-
ation as it existed in the mid 1980s. In the basic “parallel
plate” method, the electron beam is directed through
a beam or a static target gas between collector plates
which detect the resultant ions. Unstable species can be
studied by the “fast neutral beam” technique [63.37],
in which the neutral target species is formed by charge
neutralization from a fast ion beam, and is subsequently
ionized by a crossed electron beam. For the determi-
nation of partial ionization cross sections specific to
a given ion species in a given ionization stage, mass
spectroscopic (quadrupole mass spectrometer, electro-
static or magnetic charged particle analyzer or time of
flight) methods are used. Fourier Transform Mass Spec-
trometry (FTMS) has also been used effectively to study
fragmentation with formation of both positive and neg-
ative ions. Reference [63.38] is a recent example of this.
Absolute total ionization cross sections have been meas-
ured for a large number of species with an accuracy
of better than 10%. Christophorou and colleagues have
presented helpful compilations of ionization and other
data of particular relevance to the plasma processing
industry, [63.39, and earlier references in this journal].
A large number of mechanisms can contribute to
the ionization of atoms and molecules by electron im-
pact. For targets with only a few atomic electrons,
the dominant process is single ionization of the outer
shell, with the resultant ion being left in its ground
state. The process is direct and is characterized by
large impact parameters b and small momentum trans-
fers. The cross section varies with incident electron
energy in a way very similar to the optically allowed
Part E 63.2