Francombe M.H., Vossen J.L. Physics of Thin Films. Vol.14. Contemporary preparative techniques

For the last 30 years, international summer schools in plasma physics have been held at Culham Laboratory, in Oxfordshire. Culham is the United Kingdom centre for research in magnetically confined fusion plasmas, and is the site of the Joint European Torus. This book has been developed from lectures given at these schools, and provides a wide-ranging introduction to the theoretical and experimental study of plasmas and their applications. The fir...

Springer, 2005, 496 pages This book provides an overview of modern plasma research with special focus on confinement and related issues. Beginning with a broad introduction, the book leads graduate students and researchers – also those from related fields - to an understanding of the state-of-the-art in modern plasma physics. Furthermore, it presents a methodological cross section ranging from plasma applications and plasma diagnostics to numer...

Academic Press, San Diego, 1994, 322 c. В книге представлены несколько больших обзоров: 1) Конструкция плазменных источников высокой плотности для обработки материалов 2) Плазменные источники на основе электрон-циклотронного резонанса и их использование для плазменного осаждения тонких пленок 3) Несбалансированное магнетронное распыление 4) Формирование частиц (пылевых) в технологической плазме.

CRC Press, Taylor & Francis Group, 2005, Pages: 592 While ion-beam techniques have been used to create thin films in the semiconductor industry for several decades, these methods have been too costly for other surface treatment applications. However, as manufacturing devices become increasingly smaller, the use of a directed-energy ion beam is finding novel industrial applications that require the custom tailoring of new materials and devi...

Springer, 2010, 533 pages A nonlinearity is one of the most important notions in modern physics. A plasma is rich in nonlinearities and provides a variety of behaviors inherent to instabilities, coherent wave structures and turbulence. The book covers the basic concepts and mathematical methods, necessary to comprehend nonlinear problems widely encountered in contemporary plasmas, but also in other fields of physics and current research on self...

Taylor & Francis, CRC Press, 2006, Pages: 330 Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagn...

William Andrew, 2010, 912 pages Recent years have seen a rapid expansion in the applications of advanced thin film coatings in areas including photovoltaics, energy conversion, energy efficiency, biomedical engineering, telecommunications, pharmaceuticals and flat panel displays. In a tough economic climate, surface engineering remains a growth industry, because surface engineered products improve performance, increase energy efficiency, add fu...

Elsevier Science, 2006, Pages: 722 The current status of the science and technology related to coatings, thin films and surface modifications produced by directed energy techniques is assessed in this book. The subject matter is divided into 20 chapters - each presented at a tutorial level - rich with fundamental science and experimental results. New trends and new results are also evoked to give an overview of future developments and applicat...

Noyes publications, Park Ridge, New Jersey, U.S.A. 1990, 536 стр. Рассматриваются физические основы ряда газовых разрядов, используемых в плазменных технологиях для травления и осаждения различных покрытий. Книга имеет следующие разделы. Techniques for ic processing. Introduction to plasma concepts and discharge configurations. Fundamentals of sputtering and reflection. Bombardment-Induced compositional change with alloys, Oxides, Oxysalts, And h...

IOP, Institute of Physics Publishing, Bristol and Philadelphia, 2001, 645 c. Второй том книги о плазменных технологиях. Содержит разделы: Surface Interactions in Plasma Processing Atmospheric Pressure Plasma Sources Vacuum Plasma Sources Plasma Reactors for Plasma Processing Specialized Techniques and Devices for Plasma Processing Parametric Plasma Effects On Plasma Processing Diagnostics for Plasma Processing Plasma Treatment of Surfaces Surface...