Suzuki K., Smith B.W. Microlithography - Science and Technology

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  2. Академическая и специальная литература
  3. Радиоэлектроника
  4. Технологии РЭС
Радиоэлектроника
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  • добавлен 04 декабря 2011 г.
Suzuki K., Smith B.W. Microlithography - Science and Technology
CRC Press, 2007, 864 pages. 2nd Edition (Opitcal Science and Engineering Series).

This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from elementary concepts to advanced aspects of mode submicron microlithography. Each chapter reflects the current research and practices from the world's leading academic and industrial laboratories detailed by a stellar panel of inteational experts.

New in the Second Edition
In addition to updated information on existing material, this new edition features coverage of technologies developed over the last decade since the first edition appeared, including…
Immersion Lithography
157nm Lithography
Electron Projection Lithography (EPL)
Extreme Ultraviolet (EUV) Lithography
Imprint Lithography
Photoresists for 193nm and Immersion Lithography
Scatterometry

Microlithography: Science and Technology, Second Edition authoritatively covers the physics, chemistry, optics, metrology tools and techniques, resist processing and materials, and fabrication methods involved in the latest generations of microlithography such as immersion lithography and extreme ultraviolet (EUV) lithography. It also looks ahead to the possible future systems and technologies that will bring the next generations to fruition.

Loaded with illustrations, equations, tables, and time-saving references to the most current literature, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to achieve robust, accurate, and cost-effective microlithography processes and systems.
Похожие разделы
  1. Академическая и специальная литература
  2. Наноматериалы и нанотехнологии
  3. Технологии получения наноматериалов и наноструктур
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