Springer 1986 (Tokyo 1981) pp.450.
VLSI – Very Lage Scale Integration – Технология больших интегральных схем. .
VLSI Technology summarizes the main results of the research performed by the Japanese VLSI Technical Research Association. The studies concentrated on silicon as the major basis of mode semiconductor devices. The results presented are on microfabrication technology, the electron-beam concept, the required software, the patte transfer method and the problem of photo-resist for both electron-beam and X-ray illumination.
Contents:
Introduction.
Electron Beam Lithography.
Patte Replication Technology.
Mask Inspection Technology.
Crystal Technology.
Process Technology.
Fundamentals of Test and Evaluation.
Basic Device Technology.
Для специалистов в области фотолитографии, электронолучевой литографии, разработчиков соответствующей техники, приборов твердотельной электроники, в том числе транзисторных ИС, ИС на туннельных и Джозефсоновских сверхпроводящих переходах.
VLSI – Very Lage Scale Integration – Технология больших интегральных схем. .
VLSI Technology summarizes the main results of the research performed by the Japanese VLSI Technical Research Association. The studies concentrated on silicon as the major basis of mode semiconductor devices. The results presented are on microfabrication technology, the electron-beam concept, the required software, the patte transfer method and the problem of photo-resist for both electron-beam and X-ray illumination.
Contents:
Introduction.
Electron Beam Lithography.
Patte Replication Technology.
Mask Inspection Technology.
Crystal Technology.
Process Technology.
Fundamentals of Test and Evaluation.
Basic Device Technology.
Для специалистов в области фотолитографии, электронолучевой литографии, разработчиков соответствующей техники, приборов твердотельной электроники, в том числе транзисторных ИС, ИС на туннельных и Джозефсоновских сверхпроводящих переходах.