• формат pdf
  • размер 4.97 МБ
  • добавлен 11 января 2012 г.
Garry S. May, Ph.D., Costas J. Spanos, Ph.D. Fundamentals of Semiconductor Manufacturing and Process Control
Contents.
Introduction to Semiconductor Manufacturing.
Technology Overview.
Process Monitoring.
Statistical Fundamentals.
Yield Modeling.
Statistical Process Control.
Statistical Experimental Design.
Process Modeling.
Advanced Process Control.
Process and Equipment Diagnosis.
of the book places the manufacture of integrated circuits into its.
historical context, as well as provides anoverviewof mode semiconductorman.
ufacturing.
n the Chapter 2, we provide a broad overview of the manufacturing.
technology and processes ?ows used to produce a variety of semiconductor prod.
ucts.
arious process monitoring methods, including those that focus on product.
wafers and those that focus on the equipment used to produce those wafers, are.
discussed in Chapter.
As a backdrop for subsequent discussion of statistical process control (Spc),
provides a review of statistical fundamentals. Ultimately, the key metric.
to be used to evaluate any manufacturing process is cost, and cost is directly impacted.
by yield.
Yield modeling is therefore presented in Chapter.
then focuses on the use of Spc to analyze quality issues and improve yield.
Statistical experimental design, which is presented in Chapter 7, is a powerful approach.
for systematically varying controllable process conditions and determining their impact.
on output parameters which measure quality. Data derived from statistical experiments.
can then be used to construct process models that enable the analysis and prediction of manufacturing process behavior.
Process modelingconcepts are introduced inChapter.
Finally, several advanced process control topics, including run-by-run, supervisory control,
and process and equipment diagnosis, are the subject of Chapters 9 and.
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