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Leach R. Optical Measurement of Surface Topography
Springer-Verlag, Berlin, 2011, 323 pages

The measurement and characterisation of surface topography is crucial to mode manufacturing industry. The control of areal surface structure allows a manufacturer to radically alter the functionality of a part. Examples include structuring to effect fluidics, optics, tribology, aerodynamics and biology. To control such manufacturing methods requires measurement strategies. There is now a large range of new optical techniques on the market, or being developed in academia, that can measure areal surface topography. Each method has its strong points and limitations. The book starts with introductory chapters on optical instruments, their common language, generic features and limitations, and their calibration. Each type of mode optical instrument is described (in a common format) by an expert in the field. The book is intended for both industrial and academic scientists and engineers, and will be useful for undergraduate and postgraduate studies.

Introduction to Surface Texture Measurement
Some Common Terms and Definitions
Limitations of Optical 3D Sensors
Calibration of Optical Surface Topography Measuring Instruments
Chromatic Confocal Microscopy
Point Autofocus Instruments
Focus Variation Instruments
Phase Shifting Interferometry
Coherence Scanning Interferometry
Digital Holographic Microscopy
Imaging Confocal Microscopy
Light Scattering Methods
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