Prutton M., Gomati M.M. El (Eds.) Scanning Auger electron microscopy

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Prutton M., Gomati M.M. El (Eds.) Scanning Auger electron microscopy
John Wiley & Sons, 2006, 368p.
Introduction
The Auger Process
Instrumentation
The Spatial Resolution
Forming an Auger Image
Image Processing and Interpretation
Quanti?cation of Auger Images
Applications: Materials Science
Applications: Semiconductor Manufacturing
Concluding Remarks
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  1. Академическая и специальная литература
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