
1020 Part 5 Special Structures
Table 5.2-24 Parameters of the atom–surface potential. Values of ε
n
are given in the order n = 0, 1, 2, 3 .... References
to the original papers are given in [2.15]
Crystal Face Atom/ D (meV) z
m
(Å) z
vW
(Å) C
3
(meV Å
3
) ε
n
(meV)
molecule
Ag
(110) H
2
31.7 3.27 0.755 714 25.3, 16.4, 9.7, 5.3, 2.5, 1.1
He 6.0 0.755 249 4.44, 2.18, 0.92, 0.31, 0.1
(111) H
2
32.5 2.5 0.2 714 25.5, 16.6, 9.9, 5.4, 2.5, 1.1
Al (110) He 5.2 4.47 1.71 202 3.65
Au (111) He 8.0 3.98 1.34 274 5.91
Cu (110) He 6.27 3.65 1.21 235 4.52, 2.2, 1.0, 0.3
GaAs (110) He (7) (3.5) (−0.2) (473) (4.2)
NaCl (100) He 6.1 3.49 1.03 106 4.1, 1.5, 0.31
LiF
(100) He 8.5 2.98 0.79 93 (137) 5.9, 2.46, 0.78, 0.21
Ne 13.5 192 11.7
Ni (100) He 4.2 (theory) 3.76 (theory) 218
Pd (110) He 8.05 3.60 211 6.42
Pt (110) 2×1 He 8.8 251 7.4, 5.1, 3.1, 1.5
Si (100) He 174
W (110) He 265 5.6
5.2.5 The Space Charge Layer at the Surface of a Semiconductor
Surface states in the gap of a semiconductor may trap
or loose electrons. The localized charge in surface states
is neutralized by a macroscopic space charge layer of
opposite sign, caused by accumulation or depletion of
the bulk carriers. The potential associated with the space
charge gives rise to a band bending of the bulk bands
at the surface. Band bending alters various properties
of semiconductor surfaces and is crucial for many ap-
plications, such as chemisorption, catalysis, corrosion,
and, most significantly, channel conductivity in MOS
field-effect transistors. For this reason, the problem of
the surface space charge layer is treated extensively in
the following sections.
5.2.5.1 Definitions and Notation
Figure 5.2-60 shows the main parameters that character-
ize the space charge layer. With reference to the figure,
the following definitions can be given:
•
E
i
(z) is the intrinsic level: this level runs parallel to
the band edges and coincides, in the bulk, with the
intrinsic Fermi level E
ib
:
E
ib
=
E
c
+E
v
2
+
1
2
k
B
T ln
N
v
N
c
.
•
The following quantities related to band bending:
u(z) ≡
E
F
−E
i
(z)
k
B
T
,
v(z) = u(z) −u
b
≡
E
ib
−E
i
(z)
k
B
T
,
(2.1)
where v
s
, u
s
,andu
b
are the values of v(z),andu(z)
at the surface and the value of u(z) in the bulk; u
b
> 0
for n-type semiconductors and u
b
< 0 for p-type
semiconductors. If v
s
> 0 the band bends downward;
if v
s
< 0 the band bends upward. v
s
= 0 is the con-
dition for flat bands, and u
s
= 0 the condition for an
intrinsic surface.
An accumulation layer exists if v
s
and u
b
have the same
sign (as in Fig. 5.2-60).
An depletion layer exists if v
s
and u
b
have opposite signs
and u
s
and u
b
have the same sign.
An inversion layer exists if both of the pairs v
s
, u
b
and
u
s
, u
b
have opposite signs.
•
Debye length:
L
D
=
ε
0
ε
b
k
B
T
q
2
(n
b
+ p
b
)
,
(2.2)
where n
b
and p
b
are the bulk carrier concentra-
tions and q is the elementary charge. For small
Part 5 2.5