208
INDEX
Background
(of
spectra),
7, 11, 26,
37,
54, 60, 63, 66, 70, 71, 76,
132,
171,
186
Back-scattered electron,
19, 186
Baking,
18
Ball
cratering,
79,
107–110, 124,
186
Beam
current,
19, 33
(Table),
34,
96-98,
186
Beam
current
density,
187
Beer-Lambert,
12, 79, 80, 82, 86, 131
Binding
energy,
6, 23, 28, 62, 63, 66,
68,
69, 92,
122, 129, 131, 141,
150,
159, 170, 185,
187
Bragg angle,
25, 51
Bragg
equiation,
25
Bremsstrahlung,
26, 70,
141,
187
Brightness
(of
electron source),
30-4
Catalyst,
1,
139-142
Ceramics,
19,
110,
139-142
Chamber,
preparation,
20
vacuum,
2,
17-18,
19
Channel
electron multiplier,
39,
45-7
Channel
plate,
45-7
Channeltron,
39,
45–7
Charge
compensation,
28, 90,
150,
177
Charge referencing,
69
Charging,
electrostatic,
19, 28, 54, 67, 69, 88,
139,
141,
184
Chemical
shift,
43,
64-6,
67, 69,
122,
141,
150-1,
170,
172,
187
Chemical
state
plots,
69-71
Cleaning,
104
Constant analyser energy (CAE),
39_40,43–44,
188
Constant retard ratio (CRR),
39,
41-44,
188
Corrosion,
1,
131-138
Crater,
93, 95, 98,
100-106,
107-110,
177
Cross section,
63, 74, 75, 95,
141,
143,
145,
see
also sensitivity
factor
Crosstalk,
62
Data system,
2, 6, 17, 37, 47, 75
Defects, critical,
143
Depth
of
analysis,
11–13,
80, 176
Depth profile,
12, 24,
79–111,
125,
131, 146-148, 155,
157,
173, 178, 180-2, 187,
188,
192
Detection
limit,
144, 176, 180,
188
Detector,
electron,
36, 38, 39,
45-47,
54, 75
position sensitive,
90
Dielectric,
143,
148
Diffraction,
24, 25, 51, 165
X-ray
photoelectron,
142
Discriminator,
47
EDX,
see
energy dispersive X-ray
spectrometers
EELS,
see
electron energy loss
spectroscopy
Electrode, extraction,
32
Electron,
detector,
see
detector, electron
Electron
energy loss spectroscopy
(EELS),
159, 165, 170-172,
184
Electron
microscope,
8, 9, 14, 20, 29,
135,
170-172, 182,
183
Electron
multiplier,
45-47
Electron probe microanalysis
(EPMA),
8, 9, 167
Embrittlement,
114–120
Emission,
field,
29,
31-3