Bhushan B. Handbook of Micro/Nano Tribology, Second Edition

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FIGURE 14.50 Nanohardness and normal load as a function of residual indentation depth for the as-received

Si(111) sample. (From Bhushan, B. and Koinkar, V.N., 1994, Appl. Phys. Lett. 64, 1653–1655. With permission.)

FIGURE 14.51 Nanohardness and normal load as function of residual indentation depth for virgin and C

implanted Si(111) sample. (From Bhushan, B. and Koinkar, V.N., 1994, J. Appl. Phys. 75, 5741–5746. With permis-

sion.)

FIGURE 14.52 Nanoindentation marks generated on a polished, unlubricated thin-ﬁlm rigid disk. The normal

load used in the indentation, the indentation depths, and the hardness values are indicated in the ﬁgure. (From

Bhushan, B. et al., 1994, Proc. Inst. Mech. Eng. Part J: J. Eng. Tribol. 208, 17–29. With permission.)

FIGURE 14.53 Images with nanoindentation marks generated on a polished, unlubricated thin-ﬁlm rigid disk at

140 µN (a) before subtraction and (b) after subtraction. (From Bhushan, B. et al., 1994, Proc. Inst. Mech. Eng. Part

J: J. Eng. Tribol. 208, 17–29. With permission.)

FIGURE 14.54 Nanohardness and elastic modulus as a function of residual indentation depth for Si(100) and

100-nm-thick coatings deposited by sputtering, ion beam, and cathodic arc processes. (From Kulkarni, A.V. and

Bhushan, B., 1997, J. Mater. Res. 12, 2707–2714. With permission.)

FIGURE 14.55 (a) Surface height and elasticity maps for an MP tape A (σ = 6.72 nm and P-V = 31.7 nm). σ and

P-V refer to standard deviation of surface heights and peak-to-valley distance, respectively. The gray scale on the

elasticity map is arbitrary. (From DeVecchio, D. and Bhushan, B., 1997, Rev. Sci. Instrum. 68, 4498–4505. With

permission.)

FIGURE 14.56 Surface height and elasticity maps for a scan size 10 × 10 µm for three tape formulations: Tape A

(σ = 15.1 nm and P-V = 171 nm), tape B (σ = 10.4 nm and P-V = 136 nm), tape C (σ = 14.4 nm and P-V = 117 nm).

(From DeVecchio, D. and Bhushan, B., 1997, Rev. Sci. Instrum. 68, 4498–4505. With permission.)

References

Andoh, Y., Oguchi, S., Kaneko, R., and Miyamoto, T. (1992), “Evaluation of Very Thin Lubricant Films,”

J. Phys. D: Appl. Phys. 25, A71–A75.

Anonymous (1988), “Properties of Silicon,” EMIS Data Reviews Series, No. 4, INSPEC, The Institution

of Electrical Engineers, London.

Bhushan, B. (1992), Mechanics and Reliability of Flexible Magnetic Media, Springer-Verlag, New York.

Bhushan, B. (1993), “Magnetic Recording Surfaces,” in Characterization of Tribological Materials (W.A.

Glaeser, ed.), pp. 116–133, Butterworth-Heinemann, Boston.

Bhushan B. (1994), “Tribology of Magnetic Storage Systems,” in Handbook of Lubrication and Tribology,

Vol. 3, pp. 325–374, CRC Press, Boca Raton, FL.

Bhushan, B. (1995a), “Nanotribology and Its Applications to Magnetic Storage Devices and MEMS,” in

Forces in Scanning Probe Methods (H.J. Guntherodt, D. Anselmetti, and E. Meyer, eds.), Vol. E 286,

pp. 367–395, Kluwer Academic, Dordrecht, The Netherlands..

Bhushan, B. (1995b), “Micro/Nanotribology and Its Application to Magnetic Storage Devices and

MEMS,” Tribol. Int. 28, 85–95.

Bhushan, B. (1996a), Tribology and Mechanics of Magnetic Storage Devices, 2nd ed., Springer-Verlag, New York.

Bhushan, B. (1996b), “Contact Mechanics of Rough Surfaces in Tribology: Single Asperity Contact,” Appl.

Mech. Rev. 49, 275–298.

Bhushan, B. (1997), Micro/Nanotribology and Its Applications, E330, Kluwer Academic Publishers, Dor-

drecht, Netherlands.

FIGURE 14.57 Tip deﬂection as a function of sample traveling distance curves for a natural diamond (a) right

after the tip has been indented into as-deposited fullerene ﬁlm and (b) after the tip has been scanned over the

diamond surface for a short time. (From Ruan, J. and Bhushan, B., 1993, J. Mater. Res. 8, 3019–3022. With permis-

sion.)

TABLE 14.6 Chemical Structure, Molecular Weight, and Viscosity of Perﬂuoropolyether Lubricants

Lubricant Formula

Molecular

Weight

(Daltons)

Kinematic

Viscosity

cSt(mm

/s)

Fomblin Z-25 CF

–O–(CF

–CF

–O)

–(CF

–O)

–CF

12800 250

Fomblin Z-15 CF

–O–(CF

–CF

–O)

–(CF

–O)

–CF

(m/n ~2/3) 9100 150

Fomblin Z-03 CF

–O–(CF

–CF

–O)

–(CF

–O)

–CF

3600 30

Fomblin Z-DOL HO–CH

–CF

–O–(CF

–CF

–O)

–(CF

–O)

–CF

–CH

–OH 2000 80

Fomblin AM2001 Piperonyl–O–CH

–CF

–O–(CF

–CF

–O)

–(CF

–O)

–CF

–O–piperonyl

2300 80

Fomblin Z-DISOC O–CN–C

–(CH

)–NH–CO–CF

–O–(CF

–CF

–O)n–(CF

–O)m–CF

–CO–

NH–C

–(CH

)–N–CO

1500 160

Fomblin YR CF

–O–(C–CF

–O)

(CF

–O)

–CF

(m/n~40/1) 6800 1600

Demnum S-100 CF

–CF

–O–(CF

–CF

–O)

–CF

5600 250

Krytox 143AD CF

–CF

–O–(C–CF

–O)

–CF

2600 —

3,4-Methylenedioxybenzyl.

FIGURE 14.58 AFM (right) and the enlarged region and cross-sectional view of the particulate rigid disk surface

and the AFM tip (left) during lubricant ﬁlm thickness measurement. (From Mate, C.M., 1992, Phys. Rev. Lett. 68,

3323–3326. With permission.)

Bhushan, B. (1998a), “Micro/Nanotribology Using Atomic Force/Friction Force Microscopy: State of the

Art,” Proc. Inst. Mech. Eng. Part J: J. Eng. Tribol. 212, 1–18.

Bhushan, B. (1998b), Tribology Issues and Opportunities in MEMS, Kluwer Academic, Dordrecht, Neth-

erlands.

Bhushan, B. (1998c), “Contact Mechanics of Rough Surfaces in Tribology: Multiple Asperity Contact,”

Tribol. Lett. 4, 1–35.

Bhushan, B. and Blackman, G.S. (1991), “Atomic Force Microscopy of Magnetic Rigid Disks and Sliders

and Its Applications to Tribology,” ASME J. Tribol. 113, 452–458.

Bhushan, B. and Majumdar, A. (1992), “Elastic-Plastic Contact Model for Bifractal Surfaces,” Wear 153, 53–64.

Bhushan, B., Gupta, B.K., Van Cleef, G.W., Capp, C., and Coe, J.V. (1993a), “Sublimed C

Films for

Tribology,” Appl. Phys. Lett. 62, 3253–3255.

Bhushan, B., Ruan, J., and Gupta, B.K. (1993b), “A Scanning Tunneling Microscopy Study of Fullerene

Films,” J. Phys. D: Appl. Phys. 26, 1319–1322.

FIGURE 14.59 The force perpendicular to the surface acting on the tip as a function of the particulate disk sample

position, as the sample is ﬁrst brought into contact with the tip (x) and then pulled away (+). The sample is moved

with a velocity of 100 nm/s, and the zero sample position is deﬁned to be the position where the force on the tip is

zero when in contact with the sample. A negative force indicates an attractive force. (From Bhushan, B. and Blackman,

G.S., 1991, ASME J. Tribol. 113, 452–458. With permission.)

FIGURE 14.60 Histograms of lubricant thickness distribution at three different regions of a particulate disk. (From

Bhushan, B. and Blackman, G.S., 1991, ASME J. Tribol. 113, 452–458. With permission.)