
Inversion Layers
599
The formulas describing the profiles of charge around heterostructure junctions
are not dramatically different from those of Section 19.4.2, and the main physical
results can be deduced from diagrams in the spirit of Figs. 19.11 and 19.14, as
displayed in Figure 19.18. The electron bands are discontinuous in the vicinity of
the junction, which permits some interesting possibilities. A notch in the bands,
such as shown in Figure 19.18(C), creates a small region that is occupied even at
zero temperature, called an inversion layer.
Metal-Oxide-Silicon Junctions.
A similar notched potential can be created in a layered structure with a thin in-
sulating coating separating metal and semiconductor, as illustrated in Figure 19.19.
When the semiconductor is silicon and the insulator is silicon oxide, the junction
is known by the acronym MOS. This combination can be used to create very com-
pact, fast transistors, with low power dissipation, and has therefore become the
most important technology in the creation of integrated circuits. The acronym
CMOS refers to complementary metal-oxide-silicon, which means that both p-
and n-type structures are built on the same chip. These structures are discussed in
texts on semiconductor devices, such as Sze (1981) and Sze (1998).
Figure 19.19. Metal-insulator-semiconductor (MIS), and, more particularly, metal-
oxide-silicon (MOS) junctions provide an alternative to heterojunctions in forming in-
version layers. By raising the voltage of the metal by
VA
above the silicon, electrons are
pulled over to the interface with the insulator, and the Fermi level /x can be pulled above
the conduction band edge.
Two-Dimensional Electron Gas. Some of the most interesting physical dis-
coveries in heterostructures have been built upon the two-dimensional
electron
gas
(2DEG), the principle behind which was illustrated in Figures 19.18 and 19.19. By
doping both sides of a heteroj unction sufficiently, the chemical potential can be
made to rise until it intersects a small corner of the conduction band, as shown in
Figures 19.18(C) and 19.18(D). Even at the very lowest temperatures, electronic
states must be populated in the vicinity of the corner. One way to view Figure
19.18(D) is that it sets up a one-dimensional problem of elementary quantum me-
chanics, which is to find the eigenstates of a particle in a triangular potential. As
shown in Section
18.4.3,
a one-dimensional attractive potential always has at least
one bound state, no matter how shallow and small it may be. The potential barriers