
Surfaces 9
1.2.2.2.2. Frequency parameters
In order to analyze periodic surface defects and to quantify the degree of
correlation between two given points, we use spectral analysis. In this respect, the
basic tool is the Fourier transform of the function z(x):
2
()
isx
Ts zxe dx
S
f
f
³
[1.10]
The energy spectral density G(s), defined as the square modulus of the Fourier
transform of z(x), can be used to analyze the periodicity of the microgeometric
surface state:
2
() ()Gs Ts
[1.11]
The autocorrelation function C(μ) is also used to analyze the anisotropy of the
state of the surface, and to establish the degree of correlation between two
coordinates separated by a distance μ:
0
1
() lim ()( )
L
L
Czxzxdx
L
PP
of
³
[1.12]
where C(μ) gives the probability of finding two points, at the same height, separated
by a distance μ. C(μ) equals 1 when μ = 0 and decreases pseudo-exponentially,
tending asymptotically to zero for large μ. If the surface contains a periodic defect of
period Ȝ (induced, for example, by a machining process), the curve C(μ) will show a
peak each time μ is a multiple of Ȝ.
1.2.2.3. Experimental techniques
1.2.2.3.1. Stylus profilometers
Stylus profilometers (or 3D profilometers) are devices equipped with a
mechanical stylus consisting of a diamond tip whose radius of curvature is generally
between 1 and 2 μm. The surface to be analyzed is moved under the stylus by two
stepping motors that allow orthogonal movements with micron-level steps. The
vertical movements of the stylus follow the topographic defects of the surface and
are analyzed using a sensor that generates an electrical signal which is in turn
digitized and processed by computer (see Figure 1.9). Figure 1.10 shows an example
of 3D topographic measurement of a surface.